Abstract
A technique is described for delineating large metallization patterns, based on the use of non-line-of-sight vacuum techniques through specially designed rib-supported mask structures. These reusable masks were developed to solve problems of fabricating masks containing long and narrow closely spaced apertures, poorly supported cantilever sections, and free-standing islands. The method provides accurate delineation of metallization patterns in a single vacuum deposition step. The masks are fabricated out of graphite by air abrasion machining.
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