Abstract
The problem of surface waves in a semiconductor chip is solved. Under certain conditions, there are two maxima on the curve of the damping factor for an E surface wave as a function of the resistivity of the semiconductor. The first maximum corresponds to the condition that the skin depth is equal to the thickness of the chip. The second maximum corresponds to the situation in which the period of the electromagnetic field is equal to the scale time for the relaxation to the diffusion-drift equilibrium in the semiconductor. This second maximum does not occur in the case of an H wave.
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