Abstract

This letter presents a novel strategy for template synthesis of polymer structures with laser machined substrates. User-designed patterns of submicrometer holes with aspect ratios >10:1 and depths >10 μm were produced by focusing 160 fs, 5.2 μJ laser pulses on the surface of fused silica with a high numerical aperture microscope objective. Some holes were enlarged by chemical etching. Polymer solutions were cast into the templates to create high-aspect-ratio polymer structures using replication. Engineered polymer structures prepared by this unique method are useful for a number of applications such as high surface area electrodes and biological substrates.

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