Solubility and diffusivity of manganese in silicon at high temperatures

Abstract

The solubility and the diffusivity of manganese inn-type silicon have been determined between 850° C and 1200° C using the radio-active isotope Mn-54 as a tracer. The tracer source was prepared by reduction of MnCl2, its properties were investigated by scanning electron microscopy. The solubility of manganese in silicon which is in equilibrium with Mn11Si19 was determined to be $$c_{Mn} (T) [cm^{ - 3} ] = 5 \cdot 10^{22} \cdot \exp ( - (4.8 \pm 0.9)) \cdot \exp ( - (1.35 \pm 0.1)/k_B T)$$ . For the diffusivity we obtained $$D_{Mn} (T) [cm^2 /s] = 2.1 \cdot 10^{ - 2} \cdot \exp ( - (1.05 \pm 0.1)/k_B T); (k_B [eV/K])$$ .