Abstract
This paper proposed a solid-mounted (SM) longitudinally excited shear wave resonator (i.e., YBAR). By adopting a 200 nm x-cut LiNbO3 film, top (aluminum) and bottom (platinum) electrodes in 50 nm thickness and 500 nm width, this resonator simultaneously achieves an operating frequency over 5 GHz with an electromechanical coupling coefficient exceeding 50%. Compared with previously proposed YBAR with suspended structure, the proposed SM-YBAR can effectively suppress unwanted spurious modes with only a slight loss of the electromechanical coupling coefficient. The SM-YABR also provides better device stability, possible low-temperature drift coefficient, and a more convenient and mature device processing. It has the potential to meet the multiple requirements for the next generation signal processing devices in terms of high frequency, large bandwidth, stability, and low cost, etc.
Highlights
Microwave acoustic devices based on surface acoustic waves (SAW) and bulk acoustic waves (BAW) are of great value in the communication and sensing fields
LiNbOorientation principle, for Bulk acoustic resonators (BARs) based on piezoelectric films, including the XBAR and YBAR, In In this paper, we studied and proposed a solidly mounted longitudinally excited there are two methods to suppress the radiation of the BAW from the film piezoelectric shear wave resonator (SM-YBAR) based on x-cut LiNbO3 film with excellent performance
For the YABR, it is the crystal cut of LiNbO3 film that determines we chose the x-cut LiNbO3 film to ensure that the YBAR has a larger electromechanical the piezoelectric coefficient and the direction along which the interitaltransducers transducers (IDTs) are placed on the coupling coefficient
Summary
Microwave acoustic devices based on surface acoustic waves (SAW) and bulk acoustic waves (BAW) are of great value in the communication and sensing fields. The Bragg reflector is comThe advantage of the YBAR is that the presence of the bottom electrode utilizes the electric posed alternating high and low improving acoustic impedance layers, which can effectively reflect fieldofmore efficiently, further the electromechanical coupling coefficient of the the downward resonator.radiated BAW in the piezoelectric film. LiNbOorientation principle, for BARs based on piezoelectric films, including the XBAR and YBAR, In In this paper, we studied and proposed a solidly mounted longitudinally excited there are two methods to suppress the radiation of the BAW from the film piezoelectric shear wave resonator (SM-YBAR) based on x-cut LiNbO3 film with excellent performance. Than those that are suspended, so the SM-YABR is more suitable to meet the application requirements of various mobile scenarios in the 3new generation wireless communications
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