Abstract

The Solidly Mounted Resonator (SMR) is another kind of FBAR. Bragg acoustic reflector, which is composed of a sequence of a quarter wavelength thick layers of low and high acoustic impedance, is formed under the piezoelectric stack to clamp the acoustic wave energy. In this chapter, the structure design theory, simulation of frequency response and fabricated devices with the Bragg reflector of Mo/AlN, Mo/Ti and W/Ti were discussed. A mode of transmission line was introduced to describe the behavior of the SMR. In order to obtain a high quality AlN film, the texture and the stress of multilayer film were investigated. The frequency response of the SMR with AlN/Mo, Mo/Ti and W/Ti exhibit the resonance at 1.916, 2.085 and 2.48 GHz, respectively. The devices with all reflectors show improved Q factor compared to that of AlN/Mo device.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.