Abstract
The PtGaAs solid state equilibrium phase diagram was determined at 600 °C with the use of X-ray powder diffraction, electron probe microanalysis (EPMA) and scanning electron microscopy (SEM). No ternary PtGaAs phases were found and limited solid solubility was measured in the constituent binary PtGa and PtAs compounds. GaAs, PtGa and PtAs 2 form a region of three-phase equilibrium which dominates the GaAs side of the phase diagram. The phase diagram is in agreement with previous observations that PtGa and PtAs 2 are the stable phases when platinum thin films are reacted to completion on GaAs.
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