Abstract

The PtGaAs solid state equilibrium phase diagram was determined at 600 °C with the use of X-ray powder diffraction, electron probe microanalysis (EPMA) and scanning electron microscopy (SEM). No ternary PtGaAs phases were found and limited solid solubility was measured in the constituent binary PtGa and PtAs compounds. GaAs, PtGa and PtAs 2 form a region of three-phase equilibrium which dominates the GaAs side of the phase diagram. The phase diagram is in agreement with previous observations that PtGa and PtAs 2 are the stable phases when platinum thin films are reacted to completion on GaAs.

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