Abstract
It was found that a solid-state oxygen sensor using a sputtered LaF 3 film could detect gaseous oxygen as well as dissolved oxygen in water at room temperature. The sensor e.m.f. varied logarithmically with a change in oxygen partial pressure (or oxygen concentration in water), following Nernst's equation. The 90% response time at room temperature was as short as ≈30 s to both gaseous and dissolved oxygen. Characterization of the sputtered LaF 3 film and the oxygen-sensing mechanism were described in comparison with the case of an oxygen sensor using single-crystalline LaF 3.
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