Abstract
In this paper, we present the concept and design of a four-module solid state Marx generator which is based on power MO SFETs. In each module, a self-made inductor is added based on the previous Marx circuit <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">1</sup> , so that both capacitor energy st orage (CES) and inductive energy storage (IES) are adopted, in this circuit, charging switch also acts as an opening switch to control the inductor discharging. By the special control me thod of the charge and discharge switches, compared to the n ormal Marx circuit, 2–3 times higher voltage can be obtained on the load when the opening switches are turned off. During this research, the performance with both resistive loads and c apacitive load have been measured by simulation and experi ment. With a resistive load about <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$400\Omega$</tex> , when 800V is applie d into the device, it can reach 9kV high voltage with a rise ti me about 100ns and pulsed width with 120ns. In this way, les s modularity and miniaturization of Marx circuits can be furt her developed.
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