Abstract
The solid-phase epitaxial growth of perovskite-type SrTiO3 films on Sr-deposited Si(001) substrates has been studied. Sr deposition on the Si oxide substrate reduces the thickness of the oxide layer and leads to the formation of a Si(001)-Sr(2×1) reconstructed surface. Reflection high-energy electron diffraction (RHEED) and X-ray diffraction (XRD) analyses, and atomic force microscopy (AFM) show that the SrTiO3 film grown at 80°C is amorphous and after postgrowth annealing at an elevated temperature the SrTiO3 film changes to a crystalline phase and has a smooth surface.
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