Abstract
The mass change reaction of Si3N4 ceramics during sintering in a non-carbon-element furnace was investigated in a flowing N2 gas environment as a function of the oxygen partial pressure, pO2, in the range from 2.0×10-4 to 3.0×103Pa. There were four different pO2 regions in the mass change reaction: passive oxidation, passive to active transition, active oxidation, and vaporization. It was concluded that the major reactions for the vaporization region are Si3N4(s)+3SiO2(l)→6SiO(g)+2N2(g) and Si3N4(s)→3Si(g)+2N2(g).
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