Abstract
Using thermodynamic analysis, the solid compositions of Mg in MgxZn1-xO grown by halide vapor phase epitaxy (HVPE) are calculated in terms of the various input partial pressures of the gaseous species. It is revealed that the Mg composition shows temperature stability up to 1200 °C, while there is a strong dependence on the input VI/II ratio and the input H2 partial pressure at high temperatures. Based on the thermodynamic calculations, the epitaxial growth of MgxZn1-xO layers with different Mg compositions has been demonstrated. The thermodynamic model is found to accurately describe the experimentally observed dependence of Mg compositions on the input VI/II ratio that is used in the growth of MgxZn1-xO.
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