Abstract
A two-layer SiWO x /Al 2O 3 film was deposited on a quartz glass substrate by rf reactive sputtering using Si 10W 90 and Al targets for use as a solar control glazing. The resistivity of the SiWO x film is 2.26 Ω·cm, indicating that it allows transmission of radio waves. This film shows wide absorption bands in the 500–1600 nm region and high transmittance in the 300–500 nm region, and its solar energy and visible transmittances are 50% and 58%, respectively. This film also exhibits good thermal stability. The two-layer film can be used as an effective solar control glazing that allows the transmission of radio waves and is thermally stable.
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