Abstract
Abstract The β-Ga2O3 ultraviolet (UV) detectors work in the solar-blind (UV) band due to the ultra-wide bandgap of β-Ga2O3. In this paper, a solar-blind ultraviolet detector based on an ordered nanoporous β-Ga2O3 (ONP-β-Ga2O3) film is proposed and implemented. The local enhancement effect of the ordered nanopores on light is simulated by finite-difference time-domain (FDTD) method, and the period and diameter of the nanopores are optimized. Graphene is transferred on the ONP-β-Ga2O3 film and prepared as interdigital electrodes of the solar-blind ultraviolet detectors. The optimal detector has a photo-to-dark current ratio (PDCR) of about 4.64×103 at a 5 V bias, a peak response of 2.43 A/W at 254 nm, and a UV/visible rejection ratio of about 1081. We demonstrate that the ordered nanoporous structure can localize optical field effectively. As a result, light absorption is enhanced, and response performances of the detector are improved evidently.
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