Abstract

Transparent γ-Al2O3 thin film can be utilized as an absorbent or protective layer in environmental protection. The aim of the present research work is to improve the structural and optical properties of γ-Al2O3 thin film. Al2O3 thin films were synthesized by various newly developed routes based on colloidal technique and sol–gel chemistry. Many types of starting materials (Al acetate, nitrate, isopropoxide, boehmite, and Al2O3 powders) and additives (acetic acid, HCl, HNO3, citric acid) were used in the experiments. Suspension and gel-like precursor systems were compared for layer creation. The layers were characterized by their morphology (GIXRD), surface and thickness (SEM), as well as transparency (UV–visible spectroscopy). The best quality of layer (∼90% transmittance, 50–60 nm thickness, perfect covering) has been obtained by sol–gel technique starting from Al nitrate or Al acetate.

Highlights

  • Aluminum oxide (Al2O3) thin films have received a great attention due to their high transparency, wide band gap, chemical, and thermal stability

  • The other aim was the investigation of precursor systems for layer formation in order to determine the more preferred precursor a suspension or a gel-like system

  • Regarding the transmittance data of UV–Vis spectroscopy in Fig. 1, the layer produced from boehmite sol possesses very good transparency, much higher than that of layer derived from Al2O3 sol

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Summary

Introduction

Aluminum oxide (Al2O3) thin films have received a great attention due to their high transparency, wide band gap, chemical, and thermal stability. The alumina films may be transparent in ultraviolet, visible, and near infrared regions. Their durability against hostile environments and high transparency down to 200 nm enable the alumina layers to use in environmental protection. The γ-Al2O3 thin films can be applied as a protective layer in energyefficient compact fluorescent lamps [1]. The Al2O3 thin films have found wide applications in optoelectronics, microelectronics, wear resistant, catalysis applications [2,3,4,5], anticorrosive coatings [6, 7], and adsorption techniques [8]

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