Abstract

The use of sol-gel to fabricate silica-on-silicon waveguides, and particularly erbium-doped waveguide amplifiers, is reviewed. In particular, efforts to use sol-gel to improve molecular homogeneity in heavily Er-doped silica-based films is discussed. A variety of material studies carried out to investigate the gain limitations found in these materials is then presented. These include x-ray diffraction, ellipsometry and Rutherford backscattering. Excess heat treatment is used to force crystallisation of the films, and analysis of the resulting structure is used to infer properties of the glass before the additional heating. The use of erbium alkoxide precursors is shown to alter the erbium environment in the final glass, in comparison to the use of inorganic erbium salts.

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