Abstract
A novel piezoelectric thin film of Pb(Ni 1/3Nb 2/3) 0.2Zr 0.4Ti 0.4O 3 (PNNZT, 2/4/4) has been successfully deposited on Pt/Ti/SiO 2/Si substrates via a 2-methoxyethanol based sol–gel process. The pure perovskite phase was obtained after 600 °C, 30 min annealing. The optimized annealing condition was at 650 °C for 4 h, and the derived relative permittivity and dissipation factor were 1650 and 0.05. Free-standing piezoelectric PNNZT microcantilevers were sculpted from a Au/Cr/PNNZT/Pt/Ti/SiO 2/Si wafer by a microfabrication process. Then these PNNZT microcantilevers were used as the force sensors for a scanning force microscope (SFM). Force sensors were cantilever shapes with dimensions like 125–200(l)×50(w)×3.7(t) μm 3. An image of an evaporated gold film surface was obtained by SFM using the PNNZT force sensor. The PNNZT films have been proved to be an alternative sensing material for the force sensors of SFMs. © 1997 Elsevier Science S.A.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
