Abstract
Aluminium doped ZnO (AZO) thin films have been synthesized by using a sol-gel spin coating method. The effect of Al-doping on physicochemical and NO2 sensing properties of the AZO thin films were studied. The structural and compositional analysis confirms the phase formation of ZnO and substitution of aluminium atoms into zinc oxide lattice. The gas sensing performance of AZO thin films investigated at different operational temperatures towards NO2 gas. The NO2 sensing study reveals that the 2 at% AZO film sensor shows excellent gas sensing characteristics at 200 °C.
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