Abstract

A waveguide Bragg grating (WBG) provides a flexible way for measurement, and it could even be used to measure body temperature like e-skin. We designed and compared three structures of WBG with the grating period, etching depth, and duty cycle. The two-sided WBG was fabricated. An experimental platform based on photonic integrated interrogator was set up and the experiment on the two-sided WBG was performed. Results show that the two-sided WBG can be used to measure temperature changes over the range of 35–42 °C, with a temperature measurement error of 0.1 °C. This approach has the potential to facilitate application of such a silicon-on-insulator (SOI) WBG photonic sensor to wearable technology and realize the measurement of human temperature.

Highlights

  • Accepted: 20 December 2021In the field of biomedicine, body temperature is an important physiological parameter.Today’s typical temperature sensors include resistance thermometers, mercury thermometers and infrared radiation detectors

  • Highly sensitive NIR operating emissive thermometry can be achieved through the synergy between NIR luminescence and thermal emission [2]

  • The temperature of the human body is in the range of 35–42 ◦ C, so we simulated the corresponding curve of reflection wavelength and temperature of two-sided waveguide Bragg grating (WBG) in

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Summary

Introduction

In the field of biomedicine, body temperature is an important physiological parameter. The photon-based temperature sensor adopts non-conductive silicon-on-insulator (SOI) material, which can avoid the disturbance of electric field environment to measured data and has high research value in biological and Published: 23 December 2021. A WBG is easy to integrate into a chip and compatible with complementary metal oxide semiconductor (CMOS)-compatible manufacturing technology [12] This method can greatly reduce the structure size of the waveguide to a width of several hundred nanometers and improve the temperature sensitivity [13]. SOI WBG photonic sensors had a wide temperature measurement range and high accuracy. Different from FBG, which required ultraviolet (UV) exposure of photosensitive materials in the fiber, WBG only needed to etch periodic geometric shapes on the surface or side of the waveguide to generate periodic effective refractive index distribution of the grating, which has the advantages of small volume and easy integration. The sensor sensitivity of WBG was improved by designing different grating structures and parameters

Principle
Three WBG Structure
TheThe top-surface
Experimental Results
Experimental of characterizations of two-sided
A resonant peak with a central wavelength of
Two-sidedsensor
Table of characteristic parameters
Conclusions
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