Abstract

We report on anomalous soft x-ray scattering experiments on Ni/V multilayers. The fine structure above the L2,3 absorption edges of V, observed using the first order multilayer reflection, can be interpreted as diffraction anomalous fine structure (DAFS), from which information on the local structure of V can be obtained. This interpretation is in agreement with extended x-ray absorption fine structure (EXAFS) results obtained in transmission mode on a similar Ni/V multilayer. The results demonstrate that the DAFS technique can be employed for multilayer analysis in the soft x-ray region in a similar fashion as for crystalline materials in the hard x-ray region.

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