Soft X-ray Conversion Efficiencies in Laser-Produced Xenon and Tin Plasmas in a 5–17 nm Wavelength Range

Abstract

Soft X-ray conversion efficiencies in a 5–17 nm wavelength range in xenon and tin plasmas produced by a 1.06 µm Q-switched neodymium-doped yttrium aluminum garnet laser were investigated. They were measured to be 25 and 20% for the xenon and tin plasmas, respectively at a laser intensity of about 2×1010 W/cm2. These results indicate that a stand-alone soft X-ray source using a laser-produced xenon or tin plasma is useful for various applications that require intense, soft X-ray photons in a wide wavelength range.