Soft X-Ray Emission Spectra of B K and Si L2,3 in B–Si–Ge Alloys

Abstract

Valence band B K and Si L2,3 soft X-ray emission spectra are measured for B–Si–Ge alloy films of both amorphous and microcrystalline forms to obtain information on the chemical bonding states of B and Si. The B K band spectra are similar to those of pure crystalline boron, although the linewidths are somewhat narrower. The Si L2,3 spectrum is more discrete in the amorphous alloy film than in a reference sample of amorphous hydrogenated silicon. The local structure around the Si atom in the microcrystalline alloy turns out to be similar to that in the Si crystal.