Abstract
Information about the local structure of amorphous carbon (a-C) films was obtained by comparing soft x-ray absorption spectra in the CK region of sputtered a-C films to reference carbon compounds such as hydrofullerene (C60H36), highly oriented pyrolytic graphite (HOPG), and carbon black. The spectra of the a-C films exhibited fine structures, which consisted of at least different six portions. Comparing the spectral features of the a-C films with the reference compounds and the spectral analysis by discrete variational (DV)-Xα molecular orbital calculations indicated that the fine structures of the a-C films are due to a hybrid of sp2 and sp3 carbon atoms.
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