Abstract
Excellent soft magnetic properties have been achieved for Co–Cr–O granular films with nanoscaled grains of Co distributed in the amorphous intergranular regions of Cr2O3. A rapid decrease in coercivity has been observed with the volume fraction of Co, and the minimum value of 0.39 Oe was obtained at 75.5 vol % of Co without postannealing. This value is one order of magnitude smaller than those of Co–Al–O and Co–Si–O sputtered films. The saturation magnetization, in-plane anisotropy field, and permeability below 800 MHz are 11.8 kG, 80 Oe, and 141, respectively. Because of its large saturation magnetization and in-plane anisotropy, the resonance frequency is estimated at 2.9 GHz. Therefore, Co–Cr–O granular films can be used in the high frequency devices operating over 2 GHz.
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