Abstract
The effect of addition of Al to sputtered nanocrystalline Fe-Ta-C films on the film structure, soft magnetic properties and corrosion resistance were investigated. Films were crystallized from an amorphous state to a nanocrystalline state in which ultra-fine TaC particles were dispersed. Most of the Al in the films was dissolved in α-Fe after crystallization. When the Al concentration was increased, the high-frequency permeability improved owing to the increase in electrical resistivity. The thermal stability of the soft magnetic properties was also improved over that of Fe-Ta-C films, and the film corrosion resistance improved sufficiently, probably because of the Al dissolved in α-Fe. An Fe <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">66.6</sub> Al <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">10.6</sub> Ta <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">10.5</sub> C <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">12.3</sub> nanocrystalline film after annealing at 823K exhibited a high saturation point of 1.25 T, a high permeability of 3200 at 1 MHz, a high electrical resistivity of 1.32 μΩ-m, and excellent corrosion resistance and noble pitting potential.
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