Abstract

Variations in parameters associated with the ambient environment can introduce noise in soft, body-worn sensors. For example, many piezoresistive pressure sensors exhibit a high degree of sensitivity to fluctuations in temperature, thereby requiring active compensation strategies. The research presented here addresses this challenge with a multilayered 3D microsystem design that integrates four piezoresistive sensors in a full-Wheatstone bridge configuration. An optimized layout of the sensors relative to the neutral mechanical plane leads to both an insensitivity to temperature and an increased sensitivity to pressure, relative to previously reported devices that rely on similar operating principles. Integrating this 3D pressure sensor into a soft, flexible electronics platform yields a system capable of real-time, wireless measurements from the surface of the skin. Placement above the radial and carotid arteries yields high-quality waveforms associated with pulsatile blood flow, with quantitative correlations to blood pressure. The results establish the materials and engineering aspects of a technology with broad potential in remote health monitoring.

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