Abstract

Low resistivity p-type ZnTe film was formed by close-spaced sublimation utilizing sodium compounds as sodium source for doping. Sodium was incorporated during film deposition with ZnTe sources containing various amount of Na 2Te, Na 3PO 4, or NaCl. Film resistivity of less than 1 Ω cm with hole concentration of 6 × 10 17 cm −3 was achieved by doping with Na 2Te. However, doping with Na 3PO 4 or NaCl was less effective in reducing the resistivity of ZnTe film due to low carrier concentration. Hole mobility was correlated with the microstructure of the ZnTe film, which strongly depends on the kind and content of sodium compound in the source.

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