Abstract
Abstract : In this paper, we fabricated and evaluated the gas sensor for the detection of CO gas and NO x gas among the vehicle exhaust emission gasses. The SnO 2 (tin dioxide) layer is used as the detection material, and the thin-film type and the nano-fiber type layers are deposited with various thicknesses using sputtering method and electro spinning method, respectively. The experiments are performed in the chamber where the gas concentration is controlled with mass flow controller. The fabricated devices are applied to the CO and NO x gas, where the device with the thinner SnO 2 layer shows better sensitivity. The nano-fiber has the larger surface area, and the shorter response time and recovery time are obtained. From the experimental results, both types of gas sensors successfully detect CO and NO x gases, which can be applied to measure those gases from the vehicle emissions. Key words :SnO 2 (산화주석), CO(일산화탄소), NO X (질소산화물), Semiconductor gas sensor(반도체가스센서), MEMS(미세전자기계시스템), Nano fiber(나노섬유), Electro spinning(전기방사)
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