Abstract
AlGaN/GaN-heterojunction-based hydrogen sensors were fabricated, in which SnO2 nanoparticles were added on top of the Pd catalyst to improve their response characteristics at room temperature. The SnO2 nanoparticles were deposited by a simple spin-coating method, followed by an annealing process. While the reference sensor with a Pd catalyst without SnO2 nanoparticles exhibited hydrogen reaction at room temperature with long response and recovery times, the sensor with SnO2 nanoparticles on top of the Pd catalyst exhibited dramatically faster response and recovery times due to the increased response surface area and their redox mechanism. In addition, its sensing response was further enhanced under UV illumination.
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