SnO2 film with bimodal distribution of nano-particles for low concentration hydrogen sensor: Effect of firing temperature on sensing properties

Abstract

Spin coated sensor films of nano-SnO2 with bimodal nano-size particle distribution were obtained through thermal decomposition of SnCl2 using a simple and fast single step thermal decomposition technique. The deposition was done on soda-lime glass substrates using variable decomposition/firing temperature in the range of 400–600°C at the interval of 50°C. The effect of firing temperature on structural, micro-structural and optical properties was studied by X-ray diffractometer (XRD), atomic force microscopy (AFM) and UV–Vis respectively. AFM study of the films revealed a special type of microstructure i.e. conducting larger globules of 8–20nm with smaller nanoparticles of ≤3 nm on the surface of the bigger globules. The films fired at 400°C exhibit the highest UV absorption peak compared to other samples. A highest response (Rair/Rgas=24) to 300ppm of H2 is recorded for films fired at 550°C and they exhibit sensitivity of ∼90×10−3 for concentration of H2 (1–20ppm). These sensors also exhibit good stability of resistance at the optimized operating temperature of 265°C and in the presence of different relative humidity (RH=20−100%).