Abstract
SnO2/Ag/SnO2 tri-layer thin films were prepared on glass substrates by RF magnetron sputtering of SnO2 with different O2/Ar ratio and DC magnetron sputtering of Ag.Several analytical tools such as Hall measurements,four-point probe and ultraviolet-visible-near infrared(UV-Vis-NIR) spectrophotometer were used to explore the causes of the changes in electrical and optical properties.When O2/Ar ratio is 1∶14,the film had a figure of merit of 1.69×10-2 Ω-1,the resistivity is 9.8×10-5 Ω·cm,and the sheet resistance is 9.68Ω/sq,while the average transmittance is still as high as 85% in the visible light region.In addition,when O2/Ar ratio is 1:14,The flexible SnO2/Ag/SnO2 tri-layer thin films with excellent photoelectric performance can be obtained by magnetron sputtering on PET substrates,the average transmittance is above 85%,the resistivity is 1.22×10-4 Ω·cm,and the sheet resistance is 12.05 Ω/sq.
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