Abstract
ObjectiveSmooth polishing has a good improvement on the medium and high frequency errors of the workpiece, but the surface accuracy of the workpiece will be damaged subsequently. MethodsTherefore, a nonlinear compensation method is proposed. The realization mechanism, mathematical model and compensation effect of nonlinear compensated smooth polishing are illustrated separately and verified by experiments. In addition, the process parameters and motion trajectory are optimized by theoretical simulation. ResultThe experimental results demonstrate that the full-band error of the workpiece can be improved simultaneously by the smooth polishing method based on nonlinear compensation. SignificanceThe number of iterations for the figuring experiments and smooth polishing is greatly reduced by the nonlinear compensation model, which is significantly beneficial to improve the surface convergence speed and lower the manufacturing cost.
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