Abstract
The authors describe the Berkeley intelligent processing system (BIPS), part of an effort to integrate expert system technology into IC manufacturing. The current effort of BIPS is to automate the furnace and low-pressure chemical vapor deposition (LPCVD) processing fully. Four different modules that compose BIPS (the process recipe generation module, the editor, compiler, and translator module, the monitor and diagnostic module, and the communication module) have been developed, and the results obtained using each module are discussed. Process results predicted by BIPS are in reasonable agreement with experimental results.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
