Abstract
The authors describe the Berkeley intelligent processing system (BIPS), part of an effort to integrate expert system technology into IC manufacturing. The current effort of BIPS is to automate the furnace and low-pressure chemical vapor deposition (LPCVD) processing fully. Four different modules that compose BIPS (the process recipe generation module, the editor, compiler, and translator module, the monitor and diagnostic module, and the communication module) have been developed, and the results obtained using each module are discussed. Process results predicted by BIPS are in reasonable agreement with experimental results.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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