Abstract
Data are presented showing high external differential quantum efficiency (DQE) and record-high output power in vertical-cavity surface-emitting lasers (VCSELs) with diameters below 3 µm. Good uniformity and reproducibility are achieved in devices with very small sizes. Over 75% DQEs are measured with maximum output powers of 5, 7.3, 8, 8.7 and 11.6 mW for 1, 1.5, 2, 2.5 and 3 µm diameter VCSELs, respectively.
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