Small blind-area, high-accuracy ultrasonic rangefinder using a broadband multi-frequency piezoelectric micromachined ultrasonic transducer array

Abstract

This paper presents a broadband ultrasonic rangefinder, with merits of a small blind area and high accuracy, based on a multi-frequency piezoelectric micromachined ultrasonic transducer (MF-PMUT) array. The coupling bandwidth between six types of resonant cells with adjacent resonant frequencies was studied and optimized, and these cells were then integrated into an array to broaden the bandwidth of the device. The array device showed a wide −6 dB fractional bandwidth of 108% in silicon oil. A wide bandwidth can contribute to obtaining the maximum steady-state with less excitation and reducing its residual ring-down, resulting in a small blind area. Pulse-echo ranging experiments demonstrated that the blind area was effectively reduced to 5 mm due to the multi-frequency array. For short distance measurements (<250 mm), the error was well controlled within ±0.3 mm and the 3σ accuracy was 0.445 mm. Compared with earlier reported PMUTs designed for bandwidth enhancement, the proposed broadband MF-PMUT array is much simpler in design and fabrication, revealing it as a promising candidate for short-distance high-accuracy measurements.