Abstract
This paper presents the design of a novel, small coplanar antenna using microelectromechanical systems (MEMS) and metamaterial (MTM) properties. The antenna is designed using coplanar waveguide (CPW) technology, presenting lower dielectric losses and higher signal integrity. The design method for this MEMS-MTM antenna, herein presented, is based on a composite right/left hand (CRLH) transmission Line (TL) using a mixed approach; considering the circuit model and full-wave simulations. The fabrication process is based on high-resistivity silicon wafers. The radiator has dimensions of0.017 λg×0.033 λgand a thickness of0.0116 λg, whereas the complete circuit, of 5 mm × 11 mm, is equivalent to0.14 λg×0.31 λg. The antenna is designed using MEMS parallel-plate capacitors as the radiator, which also allows for the reconfiguration of the central frequency by electrostatically varying the capacitance. The results presented here correspond to a central frequency of 8.4 GHz. Due to its small size, this antenna has a wide variety of applications in wireless circuits for different fields.
Highlights
E advancement of technology is due, in large part, to the judicious incorporation of new techniques as they become available and mature
Is paper presents the design of a novel antenna, based on MEMs and metamaterial properties, which can be used for many high-frequency applications. e objective of this work is twofold: innovating RF-microelectromechanical systems (MEMS)-MTM circuits through an original design method and a novel fabrication process, and developing ad-hoc designs for RF-MEMS-MTM circuits using surface-micromachining technology, which is fully compatible with most integrated circuit fabrication processes. ese circuits can achieve high performance, low cost, and compact size
We present the design, fabrication, and characterization of a novel MEMS-MTM antenna using a composite right/le hand (CRLH)-transmission Line (TL) (Composite Right-Le Hand Transmission Line) structure and two MEMS capacitors as a 3D element to tune the antenna in frequency
Summary
E advancement of technology is due, in large part, to the judicious incorporation of new techniques as they become available and mature. Two emerging technologies with a wide application in electronics are metamaterials [1,2,3,4,5] and microelectromechanical systems (MEMS) Using these in conjunction allows us to design and fabricate a plethora of new devices, especially in the eld of high-frequency electronics, which is increasingly in demand. We present the design, fabrication, and characterization of a novel MEMS-MTM antenna using a CRLH-TL (Composite Right-Le Hand Transmission Line) structure and two MEMS capacitors as a 3D element to tune the antenna in frequency. An electrode of these capacitors functions as the radiating element, or antenna. F 2: (a) MEMS-MTM antenna in CoventorWare and (b) details of a MEMS-MTM CRLH-TL basic cell of the fabricated antenna
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