Abstract
A disperse system of microparticles deposited on the walls of the vacuum chamber at electroarc sputtering of titanium under a nitrogen and acetylene atmosphere is studied by means of small-angle X-ray scattering. It is found that the particles with the radii of gyration R g ≈ 8–16 nm, which can be classified as mass fractals, i.e., particles (clusters) with a linear size of ~5–55 nm and a developed porous surface, make the main contribution to scattering. The fractal dimension of the particles D = 2.62.
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