Small angle glancing X-ray scattering for surface characterization of ion-implanted industrial materials

Abstract

Intense X-ray beams in synchrotron radiation (SR) facilities have potential applicabilities for characterization of industrial materials surfaces such as ion-implanted, ion-plated and so on. The authors also constructed a compact ultrahigh vacuum X-ray diffractometer using a rotating anode source as a preliminary apparatus to the measurements to be carried out in the SR facility, Spring-8, which is being constructed in Hyogo prefecture. The apparatus makes use of total reflection of X-rays and is so designed that the atoms only at the surface, ca. 10 atomic layers deep, give rise to the scattering, In this paper, results of the observations of some industrial materials surfaces by this small apparatus, even though they are not sufficiently complete yet, will be presented. They include (1) mechanically polished pure iron polycrystal surfaces (ferrite, 3 nines purity) before and after the baking at 500/spl deg/C for 20 hr in a vacuum of 10/sup -8/ Torr, which shows a sudden broadening of the scattered profiles, and (2) High Speed Steel (SKH steel) surfaces which are ion-plated by TiN at different stages in their manufacturing processes.