Abstract
We propose dynamic force microscopy (DFM) that employs a quartz cantileverin combination with an interferometric deflection sensor. The high stiffness ofthe quartz cantilever allows DFM to be performed at oscillation amplitudesas small as 1 Å. DFM topographic images can be obtained for a Si(111)-(7 × 7) surfaceeven when a blunt tip is used at room temperature. The low-noise interferometer with a deflection noisefloor of n = 15 fm Hz − 1/2 exhibits a high force sensitivity in force spectroscopy. By subtracting the huge van derWaals force contribution, we obtain a short-range force curve that is in goodagreement with the theoretical curve of the covalent bonding force. Simultaneousmeasurement of the tunneling current during DFM imaging is also demonstrated.
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