Abstract
A microgripper system is presented, which consists of a monolithic shape memory alloy (SMA) device of 2 × 5.8 × 0.23 mm3 size and an integrated optical position sensor. By use of an integrated gear actuator, the motion of gripping jaws is transmitted into a linear motion of an integrated optical slit, which is detected by change of optical transmission. The maximum stroke and force of the gripping jaws are 300 µm and 35 mN, respectively. In the range between 10 and 90 % of the maximum stroke, positioning is achieved within 140 ms with an accuracy of about 2 µm.
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