Abstract
Elastic and inelastic interaction processes of Auger (kinetic) electrons, which are excited by He + ions above (below) surfaces of Mo, W and Au, are simulated by the Monte Carlo model. Calculated results show large contributions of frequent-scattering Auger electrons to the total electron yield and of cascade electrons to the probability for emission of two electrons with the Auger neutralization of He + ions. The energy distribution of emitted Auger electrons broadens and shifts towards low-energy side, which strongly depends on the excitation depth. The calculated yield, the energy distribution and the emission statistics of Auger electrons are compared with those of kinetic electrons, as well as the observed ones, at low energies of less than 1 keV.
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