Slip planes in monoclinic β-Ga2O3 revealed from its {010} face via synchrotron X-ray diffraction and X-ray topography

Abstract

Dislocations and their arrays in a {010}-oriented β-Ga2O3 substrate were observed using synchrotron X-ray diffraction (XRD) and X-ray topography (XRT). The XRD measurements used spatially-resolved ω-rocking curves to show that dislocation arrays have a linear contrast with a lower diffraction intensity and a broader full-width at half maximum. Further XRT observations at three different vectors resolved these lines as dot contrasts aligned along the four different directions and which correspond to the outcrops of threading dislocations that lay in four different slip planes. The Burgers vectors for these dislocation arrays were determined using the ∙ invisibility criterion. The results indicate there are four slip systems of (1) {001}, (2) {01}, (3) {10}, and (4) {100}. The slip system {10} has not been previously reported.