Abstract
In order to effectively and quickly clean the surface of semiconductor silicon wafers, the fluid flow is one of the significant issues. For a batch-type silicon wafer wet cleaning bath, a slim water injection nozzle consisting of a dual tube was studied, based on theoretical calculations and experiments. A thin inner tube was placed at the optimum position in the water injection nozzle. Such a simple design could make the water injection direction normal and the water velocity profile symmetrical along the nozzle. The water flow in the wet cleaning bath was observed using a blue- colored ink tracer. When the nozzle developed in this study was placed at the bottom of the bath, a fast and symmetrical upward water stream was formed between and around the wafers.
Highlights
Semiconductor electronic devices are fabricated from semiconductor materials by various thermal, chemical and mechanical processes [1] [2]
For a batch-type silicon wafer wet cleaning bath, a slim water injection nozzle consisting of a dual tube was studied, based on theoretical calculations and experiments
For the semiconductor silicon wafer production, the batch-type wafer cleaning bath [3]-[18] is very often used for economic reasons
Summary
Semiconductor electronic devices are fabricated from semiconductor materials by various thermal, chemical and mechanical processes [1] [2]. For achieving an effective and quick cleaning process, by enhancing the conclusions of notable existing studies, any issues relating to the bath should be carefully designed. The one-way water flow is expected to be formed by the water injection from the nozzle into the bath. If the water direction from the nozzle was even very slightly slanted in one direction, a huge recirculation can occur in the bath, such as the flow around the wafer array. For items 1) and 2), the water injection direction has been evaluated in our previous studies [16] [17] for a bath which cleaned 25 pieces of the 300-mm-diameter silicon wafers. The water injection nozzle was designed and verified, based on theoretical calculations and the water flow visualization. The entire water flow in the bath was observed for verifying the design concept
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