Size-dependent dynamic pull-in instability of hydrostatically and electrostatically actuated circular microplates

Abstract

In the present study, the dynamic pull-in instability and free vibration of circular microplates subjected to combined hydrostatic and electrostatic forces are investigated. To take size effects into account, the strain gradient elasticity theory is incorporated into the Kirchhoff plate theory to develop a nonclassical plate model including three internal material length scale parameters. By using Hamilton’s principle, the higher-order governing equation and the corresponding boundary conditions are obtained. Afterward, a generalized differential quadrature (GDQ) method is employed to discritize the governing differential equations along with simply supported and clamped edge supports. To evaluate the pull-in voltage and vibration frequencies of actuated microplates, the hydrostatic-electrostatic actuation is assumed to be calculated by neglecting the fringing field effects and utilizing the parallel plate approximation. Also, a comparison between the pull-in voltages predicted by the strain gradient theory and the degenerated ones is presented. It is revealed that increasing the dimensionless internal length scale parameter or decreasing the applied hydrostatic pressures leads to higher values of the pull-in voltage. Moreover, it is found that the value of pull-in hydrostatic pressure decreases corresponding to higher dimensionless internal length scale parameters and applied voltages.