Abstract
Miniaturized products and components are part of today’s daily life. The comfort and security of automobiles is increased by use of micro sensors and actuators. Electronic devices, such as mobile phones and MP3-players, have reached very small sizes and miniaturized medical instruments facilitate endoscopic surgery. Due to the advantages of micro technological solutions, such as small dimensions and low weight, Micro Systems Technology (MST) is worldwide considered a key technology of the 21st century. The new NEXUS market analysis forecasts a yearly growth of the world markets of 16% for products based on MST (Wicht & Bouchaud, 2005). Miniaturization and simultaneous function integration are leading to increased requirements regarding production technology as a result of scaling effects, technical and assembly related problems (van Brussel et al., 2000). For MST products, micro assembly uncertainties in the range of a few micrometers or even less than one micrometer are required.
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