Size modulated transition in the fluid–structure interaction losses in nano mechanical beam resonators

Abstract

An understanding of the dominant dissipative mechanisms is crucial for the design of a high-Q doubly clamped nanobeam resonator to be operated in air. We focus on quantifying analytically the viscous losses—the squeeze film damping and drag force damping—that limit the net quality factor of a beam resonator, vibrating in its flexural fundamental mode with the surrounding fluid as air at atmospheric pressure. Specifically, drag force damping dominates at smaller beam widths and squeeze film losses dominate at larger beam widths, with no significant contribution from structural losses and acoustic radiation losses. The combined viscous losses agree well with the experimentally measured Q of the resonator over a large range of beam widths, within the limits of thin beam theory. We propose an empirical relation between the maximum quality factor and the ratio of maximum beam width to the squeeze film air gap thickness.