Abstract
NiTi shape memory alloy thin film has been received considerable attention because of their application as actuators in micro-and nano-electro-mechanical systems. In this study, the analysis of NiTi shape memory thin film by combining transmission electron microscopy and nanoindentation techniques were carried out elucidating the influence of the grain size and the indentation depth on superelasticity. Partial recovery was observed from the load-depth curves formed by a Berkovich diamond indenter and the depth recovery ratio and the energy recovery ratio at various indentation depth and grain sizes were evaluated. The mechanism behind these observations are explained and extended discussed.
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