Size effect on pull-in behavior of electrostatically actuated microbeams based on a modified couple stress theory

Abstract

A variety of micro-scale experiments have demonstrated that the mechanical property of some metals and polymers on the order of micron scale are size dependence. Taking into account the size effect on the mechanical property of materials and the inherent nonlinear property of electrostatic force, the static pull-in behavior of an electrostatically actuated Bernoulli–Euler microbeam is analyzed on the basis of a modified couple stress theory. The approximate analytical solutions to the pull-in voltage and pull-in displacement of the microbeam are derived by using the Rayleigh–Ritz method. The results show that the normalized pull-in voltage of the microbeam increases by a factor of 3.1 as the microbeam thickness equals to the material length scale parameter and exhibits size effect remarkably. However, the size effect on the pull-in voltage is almost diminishing as the microbeam thickness is far greater than the material length scale parameter. The normalized pull-in displacement of the microbeam exhibits size independence and equals to 0.448 and 0.398 for the cantilever beam and clamped–clamped beam, respectively.