Abstract
AbstractPolymorphous Silicon (pm-Si:H) deposited by Plasma Enhanced Chemical Vapour Deposition (PECVD) has emerged as an alternative material to amorphous silicon (a-Si:H). Deposition parameters of pm-Si:H are such that small crystallites get embedded in a relaxed amorphous silicon matrix, thus improving the optical and electrical properties. We study the size of crystallites and degree of order in pm-Si:H using Raman and photoluminescence (PL) spectra of pm-Si:H and a-Si:H. Raman Spectra of a variety of hydrogenated nanostructured silicon (pmSi:H) and amorphous Silicon (a-Si:H) samples grown at different pressures were analyzed. Deconvolution of observed multiple peaks in photoluminescence spectra and fitting to Gaussian size distribution also yields particle size to be in the range of 2.3 to 3.5nm in agreement with Transmission Electron Microscopy and Raman results.
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