Abstract
A series of multi-scale sandwich cantilever micro-beams are prepared to investigate the size-dependent phenomenon in this paper. The sandwich micro-beam samples consist of a titanium substrate with a thickness of 1.996μm and two symmetrical nickel coatings with thickness between 106.6 and 362.6 nm by employing a physical vapor deposition method. The vibration responses of these composite micro-beams are excited by an acoustic exciter and measured by a laser Doppler vibration measurement system. It is revealed that with the decreasing of coating thickness, the dimensionless bending rigidity of nickel coating increases, and the dimensionless natural frequency of micro-beam increases first then decreases. Based on the non-classical continuum theories, the theoretical model of the sandwich micro-beam is established. Then the material length scale parameters are derived. The applicability of the non-classical continuum theories is verified when the material characteristic size of the structure is smaller than the material length scale parameter. The results are of great significance to the design and optimization of micro-/nano-electro mechanical systems.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
